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Paul Gow
Paul Gow

Public Documents 1
Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platf...
Paul Gow
Glenn Churchill

Paul Gow

and 8 more

March 30, 2024
We report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported.

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