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Tebogo  Motsei
Tebogo Motsei

Public Documents 1
Development and Characterization of a Low-cost Magnetron Sputtering System for Deposi...
Tebogo  Motsei
R.O.  Ocaya

Tebogo Motsei

and 1 more

March 08, 2023
In this study, we present the development and characterization of a homegrown magnetron sputtering system (MSS) constructed from repurposed materials. Borosilicate glass slides were used as the substrate material, while Al, Fe, and Cu were employed as target materials. The system was validated, optimized, and successfully utilized for the deposition of Cu, Al, and Fe films onto the glass substrate. The resulting samples were analyzed for their structure, morphology, photoluminescence, and electrical conductivity using XRD, EDS, SEM, and the 4-point probe method. Our findings indicate that the MSS produces results that compare favorably with standard sputtering equipment, but with significant potential for further refinement. Overall, our work highlights the feasibility and versatility of utilizing homegrown sputtering systems for a range of research applications.

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