The microwave probe is an important measurement fixture for monolithic microwave integrated circuit (MMIC). The S-parameter of the probe significantly affects the accuracy of the chip test in the de-embedding test. In this paper, a probe S-parameter extraction method is proposed by considering the influence of all calibration parameters. The results of different microwave probes and calibration kits are compared. The effect of each calibration parameter on the S-parameter of the probe is evaluated.