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Mutually exclusive cohesive and adhesive properties in the failure of thin coatings in sliding mode
  • A S Bhattacharyya
A S Bhattacharyya
Department of Metallurgical and Materials Engineering, Central University of Jharkhand, Centre of Excellence in Green and Efficient Energy Technology (CoE GEET, Central University of Jharkhand

Corresponding Author:arnab.bhattacharya@cuj.ac.in

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Abstract

Scratch tests were done on Si-C-N coatings developed on Si (100) substrates useful for MEMS devices in unconducive environments. The interfacial adhesive strength got manifested in different failure morphologies. The features depicting their chronological failures were analyzed by relating the load-scratch length plots with the scratch track image. The cohesive and adhesive strength were found to be independent to each other with each of them getting manifested in different ways.