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A Novel 4H-SiC/Si Heterojunction IGBT Achieving Low Turn-off Loss
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  • Erjun wang,
  • Xiaoli Tian,
  • Jiang Lu,
  • Xinhua Wang,
  • Chengzhan Li,
  • Yun Bai,
  • Chengyue Yang,
  • Yidan Tang,
  • Xinyu Liu
Erjun wang
CAS Institute of Microelectronics

Corresponding Author:1045937526@qq.com

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Xiaoli Tian
CAS Institute of Microelectronics
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Jiang Lu
CAS Institute of Microelectronics
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Xinhua Wang
CAS Institute of Microelectronics
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Chengzhan Li
Zhuzhou CRRC Times Semiconductor Co
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Yun Bai
CAS Institute of Microelectronics
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Chengyue Yang
CAS Institute of Microelectronics
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Yidan Tang
CAS Institute of Microelectronics
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Xinyu Liu
Institute of Microelectronics pf Chinese Academy of Sciences
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Abstract

In this paper, a novel silicon carbide (SiC) insulated gate bipolar transistor (IGBT) with a 4H-SiC/Si heterojunction in buffer layer (HBL) is proposed to improve the turn-off characteristic. Compared with the conventional 4H-SiC IGBT, the polysilicon region is integrated in the buffer layer to form a natural potential well, which can help to store excessive carriers at the turn-off process. Simulation results indicate that the turn-off time (toff) is reduced from 325 ns to 232 ns and the turn-off loss (Eoff) is decreased from 2.619 mJ to 1.375 mJ, while a similar on-state ability is maintained. That means the reduction of 28.6% toff and 47.5% Eoff can be achieved. Based on the structure benefits, a better trade-off between Eoff-VF is also achieved for the proposed HBL-IGBT. Moreover, the heterojunction of HBL-IGBT can be formed with the plasma active direct bonding technology, which is compatible with the conventional fabrication process.