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Sebastian Hagemeier
Sebastian Hagemeier
Associate Researcher at University of Kassel

Public Documents 1
A novel cubic-exp evaluation algorithm considering non-symmetrical axial response sig...
Sebastian Hagemeier
Tobias Pahl

Sebastian Hagemeier

and 3 more

February 17, 2023
The depth discrimination in confocal microscopy is based on the digital analysis of depth response signals obtained by each camera pixel during measurement. Various signal processing algorithms are used for this purpose. The accuracy of these algorithms is inter alia restricted by the axial symmetry of the signals. However, in practice response signals are rather asymmetrical especially in case of measurement objects with critical surface structures such as edges or steep flanks. We present a novel signal processing algorithm based on an exponential function with a cubic argument to handle asymmetrical and also symmetrical depth response signals. Results obtained by this algorithm are compared to those of commonly used signal processing algorithms. It turns out that the novel algorithm is more robust, more accurate and exhibits a repeatability of a similar order compared to other algorithms.

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