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Evaporation Behaviour of a Thinning Liquid Film in a Spin Coating Setup: Comparison Between Calculation and Experiment
  • José Angél Danglad-Floresa,
  • Stephan Eickelmann,
  • Hans Riegler
José Angél Danglad-Floresa
Max-Planck-Institut für Kolloid- und Grenzflächenforschung

Corresponding Author:joseangel.danglad-flores@mpikg.mpg.de

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Stephan Eickelmann
Max-Planck-Institut für Kolloid- und Grenzflächenforschung
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Hans Riegler
Max-Planck-Institut für Kolloid- und Grenzflächenforschung
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Abstract

We present comprehensive measurements of the evaporation behaviour, E, of a thinning film during a hydrodynamic-evaporative spincoating experiment. E, ω (rotational speed), and \nu (viscosity) are the main control parameters of the process. The evolution of the entire film thinning process can be described theoretically quite well based on the bulk value of \nu of the deposited liquid and with a process-specific (constant) E. The weighing in values of \nu are easily accessible (calculations, literature values, simple measurements). E is specific for the experimental conditions and values cannot be found in literature. There is also no generally accepted strategy to calculate E in advance. We analyzed our experimental results in view of a theoretical prediction for E, which was presented already some time ago by Bornside, Macosco, and Scriven, but never tested experimentally. We find good agreement between theory and experiment for many solvents and different! Accordingly, this approach permits in advance the calculation of the evolution of the entire hydrodynamic-evaporative film thinning in a spincoating process. In addition, we present a general formula, which allows in the case of spincoating mixtures of volatile solvents and nonvolatile solutes the prediction of the final solute deposit based on literature data only.
03 Jul 2020Submitted to Engineering Reports
03 Jul 2020Submission Checks Completed
03 Jul 2020Assigned to Editor
06 Jul 2020Reviewer(s) Assigned
07 Sep 2020Editorial Decision: Revise Major
15 Feb 20211st Revision Received
15 Feb 2021Submission Checks Completed
15 Feb 2021Assigned to Editor
15 Feb 2021Editorial Decision: Accept
04 Mar 2021Published in Engineering Reports. 10.1002/eng2.12390